TRIO: Miniature 3-axis Accelerometer

TRIO is a 3-axis accelerometer platform built for IDM and sensor specialists. It offers an optimal cost-to-performance ratio and is based on solutions we have developed and produced successfully for the automotive, consumer, industrial instrumentation and healthcare markets since 2000.

TRIO: Ultra-miniature 3-axis capacitive MEMS accelerometer solution

SOLUTION FOR ULTRA-MINIATURE SENSORS

Best performance-to-size ratio

To satisfy the needs of sensor specialists and IDMs seeking to integrate 3D MEMS accelerometers into their product portfolio, we have developed a solution with these features and benefits:

  • 3 independent proof-masses for low cross-axis sensitivity
  • Differential capacitive detection for higher resolution
  • Thick single-crystal structures for higher sensitivity and reliability
  • Hermetic WLP with pads on one edge for reliability and easy integration

TRANSDUCERS, CHIPSETS AND SPECIALIZED SENSORS

Proven building blocks for specific requirements

To ease integration and support the development of your sensor supply chain, our platform includes the following elements and associated know-how:

  • A customizable ultra-miniature 3-axis transducer
  • An ultra-low-power integrated circuit with 12-bit resolution and I²C/SPI output
  • An ultra-thin plastic package ideal for cost- and size-sensitive products
  • A simple and cost-effective calibration set-up