SENSORS
- Capacitive accelerometers
- Capacitive gyros
- Miniature pressure sensors
MICROFLUIDICS AND BIOMEMS
- Fluid-handling devices
- Lab-on-Chips and BioMEMS
- Cantilever-based detectors
RF MEMS
- RF Switches and varactors
- Micro-mechanical resonators
- Phase shifters and tuneable filters
OPTICAL MEMS
- Static electrostatic mirrors
- Scanning micro-mirrors
- Electrostatic adaptive optics